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۱Stability Analysis in Parametrically Excited Electrostatic Torsional Micro–actuators
نویسنده(ها): ، ،
اطلاعات انتشار: International Journal of Engineering، بيست و هفتم،شماره۳، March ۲۰۱۴، سال
تعداد صفحات: ۱۲
This paper addresses the static and dynamic stabilities of a parametrically excited torsional microactuator. The system is composed of a rectangular micro–mirror symmetrically suspended between two electrodes and acted upon by a steady (dc) while simultaneously superimposed to an (ac) voltage. First, the stability of the system subjected to a quasi–statically applied (dc) voltage is investigated, where the pull–in instability, equilibrium positions, and bifurcation points of the system are determined. Then by superimposing an (ac) voltage and extracting a Mathieu type governing equation the effects of (ac) component on the stability of the system is investigated. By varying excitation parameters (steady (dc) voltage and time–dependent amplitude of (ac) excitation), transition curves and the stability margins of the micro–mirror are demonstrated. Theoretically obtained margins are checked by means of numerical simulations. The results show that superimposing the harmonic (ac) component could have a stabilizing effect and allow an increase of the steady (dc) component beyond the pull–in value. These results could be used in design of micro–actuators.
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