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۱ANALYTICAL ANALYSIS OF CAPACITIVE PRESSURE SENSOR WITH CLAMPED DIAPHRAGM (RESEARCH NOTE)
نویسنده(ها): ،
اطلاعات انتشار: International Journal of Engineering، بيست و ششم،شماره۳، Mar ۲۰۱۳ ، سال
تعداد صفحات: ۶
In this paper analytical analysis of capacitive pressure sensor with clamped diaphragm is presented. Mechanical and electrical properties of the sensor are theoretically analyzed based on theory of thin plates with small deflection and the results are evaluated by use of finite element analysis. The central deflection and capacitance values under uniform external pressure are calculated. Comparison of theoretical results shows good agreement with finite element analysis. The results indicate that the mathematical model has a high accuracy to determine the sensor behaviors.

۲ACCURATE MODEL OF CAPACITANCE FOR MEMS SENSORS USING CORRUGATED DIAPHRAGM WITH RESIDUAL STRESS
نویسنده(ها): ،
اطلاعات انتشار: International Journal of Engineering، بيست و هفتم،شماره۱، Jan ۲۰۱۴ ، سال
تعداد صفحات: ۶
In this paper we present a new model for calculating the capacitance of MEMS sensor with corrugated diaphragm. In this work the effect of residual stress is considered on deflection of diaphragm and capacitance of sensor. First, a new analytical analyzes have been carried out to derive mathematic expressions for central deflection of corrugated diaphragm and its relationship with residual stress. Then the capacitance and sensitivity of sensor using corrugated diaphragm with residual stress are calculated under various parameters such as bias voltage and pressure. The analytical results are compared with simulation using Finite Element Method (FEM). The results show that the new analytical model is very close with simulation results.

۳MODELLING OF RESONANCE FREQUENCY OF MEMS CORRUGATED DIAPHRAGM FOR CAPACITIVE ACOUSTIC SENSORS (TECHNICAL NOTE)
نویسنده(ها): ،
اطلاعات انتشار: International Journal of Engineering، بيست و هفتم،شماره۱۲، Dec ۲۰۱۴ ، سال
تعداد صفحات: ۵
In this paper, a new model for resonance frequency of clamped circular corrugated diaphragm has been presented. First, an analytical analyzes has been carried out to derive mathematic expressions for mechanical sensitivity of diaphragm with residual stress. Next by using Rayleigh''s method we present mathematical model to calculate the resonance frequency of corrugated diaphragm and investigate the effect of residual stress, Young modulus and corrugation numbers on resonance frequency of diaphragm. In this work, MATLAB software for analytical analyzes and Intellisuite MEMS tool for finite element simulation have been used. The analytical and simulated results have been compared together and there is good agreement between them.
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